67

 C                 10.29627200   10.63331400    3.02535000
 C                 11.31564200   11.38637900    3.50189500
 H                 11.41480300   11.56310900    4.57423800
 N                 12.31836800   12.07974200    2.85520400
 C                 13.49863100   12.46777000    3.60318000
 H                 14.25656000   11.67171700    3.56933500
 H                 13.21873000   12.62840300    4.64426900
 C                 14.10155600   13.73672600    3.02804900
 H                 13.39604900   14.57288400    3.17919600
 H                 15.02688000   13.97403100    3.55700000
 N                 14.40124000   13.55962100    1.61716000
 C                 15.03590600   14.73870600    1.06505800
 H                 14.38998700   15.62973300    1.13033000
 H                 15.27927700   14.56910700    0.01568100
 H                 15.96108600   14.94593700    1.60385200
 C                 13.18404700   13.23160800    0.89367900
 H                 13.42864200   13.09136400   -0.16152300
 H                 12.44654100   14.05069600    0.96538800
 C                 12.55483700   11.96080500    1.43761000
 H                 11.60960800   11.79373400    0.93403000
 H                 13.21867600   11.10992000    1.22293000
 C                  8.74627300    8.33731300    1.10040800
 H                  8.88106700    8.05709800    0.03959600
 H                  9.38828200    7.63419200    1.65036100
 C                  7.28331100    8.02683200    1.44352000
 H                  7.08920400    8.31652600    2.48111100
 C                  6.32893400    8.81637400    0.55205200
 H                  6.50389300    8.56830200   -0.49913800
 H                  6.46781500    9.89294400    0.66072900
 H                  5.28687400    8.58530300    0.78168200
 C                  6.98577200    6.53217900    1.32800700
 H                  5.94778400    6.30599600    1.58330700
 H                  7.63218700    5.95205500    1.98996300
 H                  7.16334100    6.19029100    0.30415600
 C                  8.92583700   11.44193200   -0.07881300
 H                  8.83916900   10.90809100   -1.03809600
 H                  7.87896300   11.60686200    0.21826200
 C                  9.54083200   12.82677100   -0.32562000
 H                 10.58961300   12.71110100   -0.62904600
 C                  9.50208000   13.67605600    0.94350600
 H                  8.46499400   13.79966200    1.26945000
 H                  9.91586600   14.67201600    0.76901800
 H                 10.04923600   13.21426200    1.76829400
 C                  8.82815600   13.56149600   -1.46115500
 H                  7.77675700   13.71564800   -1.20404500
 H                  8.86193200   12.98415800   -2.38695700
 H                  9.27539600   14.54015700   -1.65211000
 Si                 9.08115800   10.13998300    4.34931000
 C                  7.37226000   10.75041600    3.83542400
 H                  7.34437800   11.84001900    3.91549800
 H                  6.58347400   10.34298300    4.47217000
 H                  7.12308200   10.49602500    2.80226800
 C                  9.03647200    8.28385400    4.66437700
 H                  8.81676800    7.70121800    3.77042600
 H                  8.27984900    8.04385900    5.41567600
 H                 10.00448000    7.95462000    5.05010600
 C                  9.45342200   10.92909800    6.01914600
 H                 10.40054800   10.58276300    6.43857000
 H                  8.66549200   10.65621200    6.72515000
 H                  9.48345500   12.01879100    5.95950300
 Al                 9.62476200   10.13025900    1.24165600
 O                 11.24907600    9.48466000    0.25651200
 H                 11.03130900    9.22465400   -0.64652600
 C                 12.09169600    8.50142000    0.88279400
 H                 13.07635100    8.52220000    0.41891200
 H                 12.16075000    8.79064400    1.92919800
 H                 11.64211800    7.51290800    0.80186900